Recent advances in the application of collimated sputtering
- B. Vollmer
- T.J. Licata
- et al.
- 1994
- Thin Solid Films
Publications
Date
Featured collections
Popular topics
310 results at Thin Solid Films
Cusp-like flaws along a rough surface
- Jiangwei Li
- Cheng-hsin Chiu
- et al.
- 1993
- Thin Solid Films
Low energy electron microscopy studies of Ge and Ag growth on Si(111)
- A.W. Denier van der Gon
- R.M. Tromp
- et al.
- 1993
- Thin Solid Films
Fabrication of extremely thin silicon on insulator for fully-depleted CMOS applications
- A. Bindal
- N. Rovedo
- et al.
- 1993
- Thin Solid Films
Transport of quasi-two-dimensional electrons in heterojunction field effect transistors
- W. Ted Masselink
- 1993
- Thin Solid Films
A model for the atomic layer epitaxy of GaAs
- Ming L. Yu
- 1993
- Thin Solid Films
Atomic layer doping for Si
- D.A. Grützmacher
- K. Eberl
- et al.
- 1993
- Thin Solid Films
Dopants on Si(100) surfaces: useful probes of silicon atomic layer epitaxy?
- S. Gates
- D.D. Koleske
- 1993
- Thin Solid Films
Potential Si atomic layer epitaxy processes using halogenated Si precursors
- D.D. Koleske
- S. Gates
- et al.
- 1993
- Thin Solid Films
The chemisorption and reaction of GeCl4 with Si(100)
- D.A. Lapiano-Smith
- F.R. McFeely
- 1993
- Thin Solid Films