Electrostatic wafer chuck for electron beam microfabrication
- George A. Wardly
- 2003
- Review of Scientific Instruments
Paper
Publications
202 results at Review of Scientific Instruments
Automatic data acquisition and control of experiments in a powder X-ray diffractometer
- A. Gangulee
- C.J. Tomko Jr.
- 2003
- Review of Scientific Instruments
PaperTarget bonding (for sputtering)
- Charles Terhune
- 2003
- Review of Scientific Instruments
PaperModified magneto-optic hysteresigraph
- D.E. Horne
- E. Sawatzky
- 2003
- Review of Scientific Instruments
PaperElectromechanical feedback control for lang topography
- Joseph Angilello
- Clinton Wood
- 2003
- Review of Scientific Instruments
PaperHigh voltage sweep and controlled magnetic lens current supplies for the electron microprobe
- David F. Kyser
- Donald E. Horne
- 2003
- Review of Scientific Instruments
PaperModular thin film deposition system
- I. Ames
- J. Hoekstra
- et al.
- 2003
- Review of Scientific Instruments
PaperA low power heater for the LaB6 rod cathode
- H. Ahmed
- W. Blair
- et al.
- 2003
- Review of Scientific Instruments
PaperWindowless photoelectron spectrometer for high resolution studies of solids and surfaces
- J.K. Cashion
- J.L. Mees
- et al.
- 2003
- Review of Scientific Instruments
PaperMagneto-optical rotation and ellipticity measurements with a spinning analyzer
- J.C. Suits
- 2003
- Review of Scientific Instruments
Paper