Publications

509 results at JES

An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- - E.A. Irene
  - E. Tierney
  - et al.
- 2019
- JES
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
The Formation of SiO₂ in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- - A. Ray
  - A. Reisman
- 2019
- JES
Plasma Oxide FET Devices
- - A. Ray
  - A. Reisman
- 2019
- JES
Radiochemical Analysis of β-Al2O3, and the Preparation of Na-22 Tagged Monocrystals
- - L.M. Foster
  - J.E. Scardefield
- 2019
- JES
Effect of Plating Parameters on Electrodeposited Nife
- - Jean Horkans
- 2019
- JES
Pre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- - M.C. Chen
  - V.J. Silvestri
  - et al.
- 2019
- JES
Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- - Alec N. Broers
- 2019
- JES
Etching Silicon with Fluorine Gas
- - M. Chen
  - V.J. Minkiewicz
  - et al.
- 2019
- JES
Oxidation and Corrosion Studies of Fe1-xPdx Films
- - Wen-Yaung Lee
  - G. Scherer
  - et al.
- 2019
- JES