Publications

2 results for E. Pan

Annealing properties of ion-implanted p-n junctions in silicon
- - Alwin E. Michel
  - F. Fang
  - et al.
- 2003
- Journal of Applied Physics
Paper
Lateral spread of ion-implanted impurities in silicon
- - E. Pan
  - F. Fang
- 2003
- Journal of Applied Physics
Paper