1 µm MOSFET VLSI Technology: Part VI― Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE JSSC
Paper
Publications
14 results for T.H.P. Chang
1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE T-ED
PaperInstrumentation for electron beam lithography
- T.H.P. Chang
- 1974
- IEEE Transactions on Magnetics
PaperAn experimental high-density memory array fabricated with electron beam
- H.N. Yu
- R.H. Dennard
- et al.
- 1973
- ISSCC 1973
Conference paper