X-ray topographic determination of the absence of lateral strains in ion-implanted silicon
- K.N. Tu
- P. Chaudhari
- et al.
- 2003
- Journal of Applied Physics
Paper
Publications
3 results for S.I. Tan
Elastic and anelastic behavior of ion-implanted silicon
- S.I. Tan
- B.S. Berry
- et al.
- 2003
- Applied Physics Letters
PaperCircular etch pits in ion-implanted amorphous silicon films
- K.N. Tu
- S.I. Tan
- et al.
- 2003
- Applied Physics Letters
Paper