Magnetic contrast in the scanning electron microscope
- G.A. Wardly
- 2003
- Journal of Applied Physics
Paper
Publications
7 results for G.A. Wardly
Dependence of spherical and chromatic aberration upon magnification in an immersion lens
- G.A. Wardly
- 2003
- Journal of Applied Physics
PaperElectrostatic wafer chuck for electron beam microfabrication
- George A. Wardly
- 2003
- Review of Scientific Instruments
PaperCorrection of eddy current errors in electron beam deflection
- G.A. Wardly
- 2003
- Journal of Applied Physics
PaperEddy-current compensating deflection yokes
- G.A. Wardly
- 2003
- Journal of Applied Physics
PaperDesign study of toroidal deflection yokes with eddy-current compensation
- G.A. Wardly
- 2003
- Journal of Applied Physics
PaperElectrode Flatness Requirements for Cathode Projection Microfabrication Systems
- George A. Wardly
- 1975
- IEEE T-ED
Paper