Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- R.S. Horwath
- 2019
- JES
Paper
Publications
6 results for C.B. Zarowin
Quasi-CW, high numerical aperture, inductively excited ion laser
- C.B. Zarowin
- C.K. Williams
- 2004
- Applied Physics Letters
PaperElectron temperature and density in argon ion laser discharges
- C.B. Zarowin
- 2003
- Applied Physics Letters
PaperTheory of plasma chemical transport etching of gold in a chlorine plasma
- C.B. Zarowin
- 1981
- Thin Solid Films
PaperA Novel Approach to the Design of a Transistorized Inverter-Converter Operating at Higher Than Audio Frequencies
- Charles B. Zarowin
- George W. Lynch
- 1972
- IEEE JSSC
PaperNew visible cw laser lines in singly-ionized chlorine
- C.B. Zarowin
- 1966
- Applied Physics Letters
Paper