Publications

2 results for Dhruv V. Patel

Deep learning-based detection, classification, and localization of defects in semiconductor processes
- - Dhruv V. Patel
  - Ravi Bonam
  - et al.
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS
Engineering neural networks for improved defect detection and classification
- - Dhruv V. Patel
  - Ravi Bonam
  - et al.
- 2019
- SPIE Advanced Lithography 2019