Publications

2 results for Akiyuki Sugiyama

Critical dimension scanning electron microscope local overlay measurement and its application for double patterning of complex shapes
- - Shoji Hotta
  - Takumichi Sutani
  - et al.
- 2011
- J. Micro/Nanolithogr. MEMS MOEMS
Spatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- - Scott Halle
  - Daniel Moore
  - et al.
- 2010
- SPIE Advanced Lithography 2010