Publications

2 results for Kazuo Terashima

Cryogenic plasmas for controlled processing of nanoporous materials
- - Francesca Iacopi
  - Jai Hyuk Choi
  - et al.
- 2011
- Physical Chemistry Chemical Physics
Breakthrough reduction of low-k damage with cryoplasma ashing
- - Francesca Iacopi
  - Jai Hyuk Choi
  - et al.
- 2010
- ADMETA 2010