Publications

2 results for Marc Millstone

Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- - David O. S. Melville
  - Alan E. Rosenbluth
  - et al.
- 2011
- Journal of Vacuum Science and Technology B
Fixed-structure discrete-time ℋ_∞ controller synthesis with HIFOO
- - Andrey P. Popov
  - Herbert Werner
  - et al.
- 2010
- CDC 2010