Publications

2 results for R. Patz

Plasma etch challenges for porous low k materials for 32nm and beyond
- - Catherine Labelle
  - R. Srivastava
  - et al.
- 2011
- CSTIC 2011
Conference paper
Porous low-k material etch for 32 nm and beyond
- - Catherine Labelle
  - John Arnold
  - et al.
- 2008
- ADMETA 2008
Conference paper