Publications

3 results for Greg M. Johnson

Leakage issues in failure analysis of P+ SiGe active area short monitor
- - Ankur Arya
  - Greg M. Johnson
  - et al.
- 2011
- IPFA 2011
Optimization of DUV lithography for high-energy well implantation
- - Ryan Deschner
  - Seong-Dong Kim
  - et al.
- 2007
- SPIE Advanced Lithography 2007
65nm CMOS technology for low power applications
- - A. Steegen
  - R. Mo
  - et al.
- 2005
- IEDM 2005