Publications

2 results for Gandharv Bhatara

Applicability of global source mask optimization to 22/20nm node and beyond
- - Kehan Tian
  - Moutaz Fakhry
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Multistep adsorption of perfluoropolyether hard-disk lubricants onto amorphous carbon substrates from solution
- - Larry E. Bailey
  - Kay K. Kanazawa
  - et al.
- 2001
- Langmuir