Publications

4 results for Hideki Kanai

Strategies for single patterning of contacts for 32nm and 28nm technology
- - Bradley Morgenfeld
  - Ian Stobert
  - et al.
- 2011
- ASMC 2011
Contact patterning strategies for 32nm and 28nm technology
- - Bradley Morgenfeld
  - Ian Stobert
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Single exposure contacts are dead. Long live single exposure contacts!
- - Henning Haffner
  - Martin Ostermayr
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Contact mask optimization and SRAF design
- - Uwe P. Schroeder
  - Cyrus Tabery
  - et al.
- 2009
- SPIE Advanced Lithography 2009