Publications

2 results for Changyong Xiao

Optimizing stressor film deposition sequence in polish rate order for best planarization
- - John H. Zhang
  - Changyong Xiao
  - et al.
- 2011
- MRS Spring Meeting 2011
Conference paper
Developing contact oxide CUP process for 32 nm technology nodes
- - John H. Zhang
  - Rajasekhar Venigalla
  - et al.
- 2008
- VMIC 2008
Conference paper