Surface Modifications of Electronic Materials Induced by Plasma Etching
- G.S. Oehrlein
- S.W. Robey
- et al.
- 2019
- JES
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81 results for Kevin Chan
Demonstration of Symmetric Lateral NPN Transistors on SOI Featuring Epitaxially Grown Emitter/Collector Regions
- Pouya Hashemi
- Jeng-Bang Yau
- et al.
- 2017
- IEEE J-EDS
Hybrid-orientation technology (HOT): Opportunities and challenges
- Min Yang
- Victor W.C. Chan
- et al.
- 2006
- IEEE Transactions on Electron Devices
N-channel MOSFETs fabricated on He-implanted and annealed SiGe buffer layers
- P.M. Mooney
- K. Rim
- et al.
- 2005
- Solid-State Electronics
Nitrogen interface engineering in Al 2O 3 capacitors for improved thermal stability
- P.D. Kirsch
- D.-G. Park
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electrical activation in silicon-on-insulator after low energy boron implantation
- Antonio F. Saavedra
- Kevin S. Jones
- et al.
- 2004
- Journal of Applied Physics
Comparison of {311} Defect Evolution in SIMOX and Bonded SOI Materials
- A.F. Saavedra
- K.S. Jones
- et al.
- 2004
- JES
Kinetics of {3 1 1} defect dissolution in silicon-on-insulator (SOI)
- A.F. Saavedra
- K.S. Jones
- et al.
- 2004
- Materials Science and Engineering: B
Secondary defect formation in bonded silicon-on-insulator after boron implantation
- A.F. Saavedra
- A.C. King
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Two gates are better than one
- P. Solomon
- K.W. Guarini
- et al.
- 2003
- IEEE Circuits and Devices Magazine