Publications

2 results for Terukazu Kokubo

Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- - Willi Volksen
  - Sampath Purushothaman
  - et al.
- 2012
- ECS J. Solid State Sci. Technol.
A Manufacturing grade, porous oxycarbosilane spin-on dielectric candidate with K 2.0
- - Willi Volksen
  - Teddie P. Magbitang
  - et al.
- 2011
- JES