Publications

3 results for V. Ryan

The effects of vacuum ultraviolet radiation on low-k dielectric films
- - H. Sinha
  - H. Ren
  - et al.
- 2012
- Journal of Applied Physics
The effects of plasma exposure on low-k dielectric materials
- - J.L. Shohet
  - H. Ren
  - et al.
- 2012
- SPIE Advanced Lithography 2012
CVD Co and its application to Cu damascene interconnections
- - Takeshi Nogami
  - J. Maniscalco
  - et al.
- 2010
- IITC 2010