A next-generation in-situ nanoprobe beamline for the advanced photon source
- Jörg Maser
- Barry Lai
- et al.
- 2013
- SPIE Optical Engineering + Applications 2013
Conference paper
Publications
10 results for Barry Lai
Synchrotron microbeam x-ray radiation damage in semiconductor layers
- Sean M. Polvino
- Conal E. Murray
- et al.
- 2008
- Applied Physics Letters
PaperHigh-resolution strain mapping in heteroepitaxial thin-film features
- C.E. Murray
- H. Yan
- et al.
- 2005
- Journal of Applied Physics
PaperStrain effects in thin film/Si substrates revealed by X-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2004
- Powder Diffraction
PaperProbing strain fields about thin film structures using x-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2003
- MRS Proceedings 2003
Conference paperMapping of strain fields about thin film structures using x-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2003
- Applied Physics Letters
PaperNanometer precision metrology of submicron Cu/SiO2 interconnects using fluorescence and transmission x-ray microscopy
- Guangyong Xu
- D.E. Eastman
- et al.
- 2003
- Journal of Applied Physics
PaperObservation of columnar microstructure in step-graded Si1-xGex/Si films using high-resolution X-ray microdiffraction
- D.E. Eastman
- C.B. Stagarescu
- et al.
- 2002
- Physical Review Letters
PaperObservation of Columnar Microstructure in Step-Graded [Formula presented] Films Using High-Resolution X-Ray Microdiffraction
- D.E. Eastman
- C.B. Stagarescu
- et al.
- 2002
- Physical Review Letters
PaperQuantitative metrology study of Cu/SiO2 interconnect structures using fluorescence x-ray microscopy
- Guangyong Xu
- X. Su
- et al.
- 2001
- Applied Physics Letters
Paper