Publications

4 results for Chidam Kallingal

Benchmarking study of 3D mask modeling for 2 and 1x nodes
- - Chang An Wang
  - Chao-Chun Liang
  - et al.
- 2013
- SPIE Advanced Lithography 2013
C-Quad polarized illumination for back end thin wire: Moving beyond annular illumination regime
- - Sohan Singh Mehta
  - Hyung-Rae Lee
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Improvements in accuracy of dense OPC models
- - Chidam Kallingal
  - James Oberschmidt
  - et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
The comparison of OPC performance and run time for dense versus sparse solutions
- - Amr Abdo
  - Ian Stobert
  - et al.
- 2008
- SPIE Advanced Lithography 2008