Publications

2 results for Huikan Liu

Enabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization
- - Bassem Hamieh
  - Hyun Chol Choi
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- - Chang An Wang
  - Chao-Chun Liang
  - et al.
- 2013
- SPIE Advanced Lithography 2013