Subtractive W contact and local interconnect co-integration (CLIC)
- Fei Liu
- Benjamin Fletcher
- et al.
- 2013
- IITC 2013
Publications
4 results for Benjamin Fletcher
Optimization of pH sensing using silicon nanowire field effect transistors with HfO2 as the sensing surface
- Sufi Zafar
- Christopher D'Emic
- et al.
- 2011
- Nanotechnology
Metallization opportunities and challenges for future back-end-of-the-line technology
- Cyril Cabral Jr.
- Benjamin Fletcher
- et al.
- 2010
- ADMETA 2010
Trigate 6T SRAM scaling to 0.06 μm2
- M. Guillorn
- J. Chang
- et al.
- 2009
- IEDM 2009