Early detection of electrical defects in deep trench capacitors using voltage contrast inspection
- Brian Donovan
- Oliver D. Patterson
- et al.
- 2013
- ASMC 2013
Conference paper
Publications
5 results for Roland Hahn
Automated SEM Offset using programmed defects
- Oliver D. Patterson
- Andrew Stamper
- et al.
- 2011
- ASMC 2011
Conference paperVoltage contrast test structure for measurement of mask misalignment
- Oliver D. Patterson
- Roland Hahn
- et al.
- 2010
- ASMC 2010
Conference paperMethodology for trench capacitor etch optimization using voltage contrast inspection and special processing
- Oliver D. Patterson
- Xing J. Zhou
- et al.
- 2010
- ASMC 2010
Conference paperCharacterization of contact module failure mechanisms for SOI technology using E-beam inspection and in-line TEM
- Xing J. Zhou
- Oliver D. Patterson
- et al.
- 2010
- ASMC 2010
Conference paper