Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si
- Pierre Turcotte-Tremblay
- Matthieu Guihard
- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
2 results for Matthieu Guihard
Controlling nickel silicide phase formation by Si implantation damage
- M. Guihard
- P. Turcotte-Tremblay
- et al.
- 2009
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms