History of atomic layer deposition and its relationship with the American Vacuum Society
- Gregory N. Parsons
- Jeffrey W. Elam
- et al.
- 2013
- JVSTA
Publications
3 results for Mikko Ritala
Atomic layer deposition of materials for phase-change memories
- Markku Leskelä
- Viljami Pore
- et al.
- 2009
- ECS Meeting 2009
Atomic layer deposition of Ge2Sb2Te5 thin films
- Mikko Ritala
- Viljami Pore
- et al.
- 2009
- Microelectronic Engineering