Publications

2 results for Colin Goyette

Post copper CMP hybrid clean process for advanced BEOL technology
- - Wei-Tsu Tseng
  - Vamsi Devarapalli
  - et al.
- 2013
- IEEE Trans Semicond Manuf
Hybrid clean approach for post-copper CMP defect reduction
- - Wei-Tsu Tseng
  - Vamsi Devarapalli
  - et al.
- 2013
- ASMC 2013