Publications

2 results for Shobha Hosadurga

First Demonstration of 16nm Pitch Subtractive Ru Interconnects for Advanced Technology Nodes
- - C. Penny
  - K. Motoyama
  - et al.
- 2025
- IITC 2025
Overlay Performance in Permanent Bonded Wafer Integration Schemes
- - Nathan Ip
  - Michael Belyansky
  - et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023