VLSI-NEMS chip for parallel AFM data storage
- M. Despont
- J. Brugger
- et al.
- 2000
- Sensors and Actuators, A: Physical
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110 results for Hugo Rothuizen
A cantilever array-based artificial nose
- M.K. Baller
- H.P. Lang
- et al.
- 2000
- Ultramicroscopy
Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
- H. Rothuizen
- U. Drechsler
- et al.
- 2000
- Microelectronic Engineering
"Millipede" - An AFM data storage system at the frontier of nanotribology
- U. Dürig
- G. Cross
- et al.
- 2000
- Tribology Letters
Ion projection lithography for resistless patterning of thin magnetic films
- W. Bruenger
- M. Torkler
- et al.
- 2000
- Microelectronic Engineering
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Ion-beam patterning of magnetic films using stencil masks
- B.D. Terris
- L. Folks
- et al.
- 1999
- Applied Physics Letters
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Despont
- et al.
- 1999
- Sensors and Actuators, A: Physical
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Confinement and Coulomb interactions in Schottky-gated, laterally confined double-barrier quantum well heterostructures
- P. Gueret
- N. Blanc
- et al.
- 1999
- Semiconductor Science and Technology