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Hugo Rothuizen- M. Despont
- T. Altebaeumer
- et al.
- 2004
- MNC 2004
- B. Nöhammer
- C. David
- et al.
- 2003
- Microelectronic Engineering
- Giovanni Cherubini
- Th. Antonakopoulos
- et al.
- 2002
- ESSCIRC 2002
- E. Eleftheriou
- Th. Antonakopoulos
- et al.
- 2002
- APMRC 2002
- H. Rothuizen
- M. Despont
- et al.
- 2002
- MEMS 2002
- P. Vettiger
- G. Gross
- et al.
- 2000
- APMRC 2000
- M. Despont
- J. Brugger
- et al.
- 1999
- MEMS 1999
- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
- C. Fumeaux
- Fritz K. Kneubühl
- et al.
- 1998
- Proceedings of SPIE - The International Society for Optical Engineering