Publications

3 results for Zheng Chen

EUV sub-resolution assist feature impact: experimental and simulation evaluation
- - Zheng Chen
  - Martin Burkhardt
  - et al.
- 2023
- OEN 2023
Focus considerations of design pitches and absorber choice for EUV random logic
- - Martin Burkhardt
  - Zheng Chen
  - et al.
- 2022
- OEN 2022
When is bilayer thin-film imaging suitable: Comparison with single layer resists
- - Scott Halle
  - Alan Thomas
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering