Publications

2 results for Danielle Durrant

Process trace analytics for process development
- - Robert J. Baseman
  - Fateh A. Tipu
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Driving down defect density in composite EUV patterning film stacks
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2017
- SPIE Advanced Lithography 2017