Publications

3 results for Matthew Sagianis

Study of surface interactions for encapsulation of phase change memory materials
- - L. Buzi
  - D. Koty
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Process trace analytics for process development
- - Robert J. Baseman
  - Fateh A. Tipu
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
- - L. Buzi
  - Hiroyuki Miyazoe
  - et al.
- 2020
- JVSTA