Publications

2 results for Michael Lam

Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk
- - David Fryer
  - Michael Lam
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- - David Melville
  - Alan E. Rosenbluth
  - et al.
- 2010
- SPIE Advanced Lithography 2010