113 results for
Michel Despont- 2010
- SPIE Advanced Lithography 2010
- Roland Guerre
- Ute Drechsler
- et al.
- 2010
- JMEMS
- L. Dellmann
- Ute Drechsler
- et al.
- 2010
- Microelectronic Engineering
- Harish Bhaskaran
- Bernd Gotsmann
- et al.
- 2010
- Nature Nanotechnology
- 2010
- Applied Physics Letters