- Franco Stellari
- Peilin Song
- et al.
- 2014
- HOST 2014
Conference paper
- X. Yu
- Oleg Gluschenkov
- et al.
- 2011
- IEDM 2011
Conference paper
- Peilin Song
- Franco Stellari
- et al.
- 2011
- HOST 2011
Conference paper
- Victor V. Zyuban
- Joshua Friedrich
- et al.
- 2011
- IBM J. Res. Dev
Paper
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paper
- Lars Liebmann
- Greg Northrop
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paper
- Lars Liebmann
- Jennifer Lund
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
Paper
Conference paper