Publications

3 results for Jassem Abdallah

Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Computational aspects of optical lithography extension by Directed Self-Assembly
- - Kafai Lai
  - Chi-Chun Liu
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Directed self-assembly process implementation in a 300mm pilot line environment
- - Chi-Chun Liu
  - I. Cristina Estrada-Raygoza
  - et al.
- 2013
- SPIE Advanced Lithography 2013