Publications

5 results for Relja Vasić

Optical properties of pseudomorphic Ge_1-xSn_x (x = 0 to 0.11) alloys on Ge(001)
- - Manasa Medikonda
  - Gangadhara R. Muthinti
  - et al.
- 2014
- JVSTB
Paper
Electrical enhancement and higher-k engineering in ultra-thin atomic layer deposited Hf_1-xAl_xO_y films
- - K. Tapily
  - S. Consiglio
  - et al.
- 2014
- ECS J. Solid State Sci. Technol.
Paper
Higher-K formation in atomic layer deposited Hf_1-xAl_xO_y
- - Kandabara Tapily
  - Steven Consiglio
  - et al.
- 2014
- ECSSMEQ 2014
Conference paper
Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO₂and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
- - Steven Consiglio
  - Kandabara Tapily
  - et al.
- 2014
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf _1-xZr_xO₂ gate dielectrics deposited by a cyclical deposition and annealing scheme
- - Relja Vasić
  - Steven Consiglio
  - et al.
- 2013
- Journal of Applied Physics
Paper