Publications

2 results for Virginia Estellers

Estimating pattern sensitivity to the printing process for varying dose/focus conditions for RET development in the sub-22nm era
- - Benoit Seguin
  - Henri Saab
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Surface reconstruction from microscopic images in optical lithography
- - Virginia Estellers
  - Jean-Philippe Thiran
  - et al.
- 2014
- IEEE TIP