Hybrid au-adhesive bonding using planar adhesive structure for 3-D LSI
- Masatsugu Nimura
- Jun Mizuno
- et al.
- 2014
- IEEE Transactions on CPMT
Publications
3 results for Akitsu Shigetou
Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration
- Akiko Okada
- Masatsugu Nimura
- et al.
- 2012
- LTB-3D 2012
Investigations of fluxless flip-chip bonding using vacuum ultraviolet and formic acid vapor surface treatment
- Naoko Unami
- Hirokazu Noma
- et al.
- 2011
- APM 2011