Publications

2 results for Augustin J. Hong

Multitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs
- - Robin Chao
  - Kriti K. Kohli
  - et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS
Novel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond
- - Robin Chao
  - Kriti Kohli
  - et al.
- 2014
- SPIE Advanced Lithography 2014