Publications

3 results for Yoshikazu Yamaguchi

Spin-on organic hardmask for topo-patterned substrate
- - Kazuhiko Komura
  - Yoshi Hishiro
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Investigation of pattern wiggling for spin-on organic hardmask materials
- - Goji Wakamatsu
  - Kentaro Goto
  - et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
High performance 193nm photoresists based on fluorosulfonamide
- - Wenjie Li
  - Kuang-Jung Chen
  - et al.
- 2007
- SPIE Advanced Lithography 2007