Publications

3 results for Yoshi Hishiro

Spin-on organic hardmask for topo-patterned substrate
- - Kazuhiko Komura
  - Yoshi Hishiro
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
- - Ramakrishnan Ayothi
  - Lovejeet Singh
  - et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Investigation of pattern wiggling for spin-on organic hardmask materials
- - Goji Wakamatsu
  - Kentaro Goto
  - et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012