3D Chip stacking with 50 μm pitch lead-free micro-c4 interconnectionsJoana MariaBing Danget al.2011ECTC 2011
Three-dimensional chip stack with integrated decoupling capacitors and thru-si via interconnectsBing DangMichael Shapiroet al.2010IEEE Electron Device Letters
Investigations of Cu bond structures and demonstration of a wafer-level 3D integration scheme with W TSVsK.N. ChenCyril Cabral Jr.et al.2010VLSI-TSA 2010
CMOS compatible thin wafer processing using temporary mechanical wafer, adhesive and laser release of thin chips/wafers for 3D integrationBing DangPaul Andryet al.2010ECTC 2010
Novel adhesive development for CMOS-compatible thin wafer handlingK. TamuraK. Nakadaet al.2010ECTC 2010
Die-to-wafer 3D integration technology for high yield and throughputKatsuyuki SakumaPaul S. Andryet al.2008MRS Fall Meeting 2008
Reliable through silicon vias for 3D silicon applicationsM.J. ShapiroM. Interranteet al.2009IITC 2009
Characterization of stacked die using die-to-wafer integration for high yield and throughputK. SakumaP. Andryet al.2008ECTC 2008
Reliability testing of through-silicon vias for high-current 3D applicationsSteven L. WrightPaul S. Andryet al.2008ECTC 2008