Publications

12 results for Wei Wang

Pre-liner dielectric nitridation for resistance reduction in copper interconnects
- - Chih-Chao Yang
  - Terry A. Spooner
  - et al.
- 2016
- IITC/AMC 2016
Through-Cobalt Self Forming Barrier (tCoSFB) for Cu/ULK BEOL: A novel concept for advanced technology nodes
- - Takeshi Nogami
  - Benjamin D. Briggs
  - et al.
- 2015
- IEDM 2015