Publications

2 results for Toshiyuki Tabata

Impact of nanosecond laser annealing on vacancies in electroplated Cu films studied by monoenergetic positron beams
- - Akira Uedono
  - Takeshi Nogami
  - et al.
- 2023
- Journal of Applied Physics
Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects
- - Takeshi Nogami
  - Oleg Gluschenkov
  - et al.
- 2022
- VLSI Technology and Circuits 2022