Publications

2 results for Andres Torres

Implementation of assist features in EUV lithography
- - Fan Jiang
  - Martin Burkhardt
  - et al.
- 2015
- SPIE Advanced Lithography 2015
A designer's guide to subresolution lithography: Enabling the impossible to get to the 14-nm node
- - Lars Liebmann
  - J. Andres Torres
- 2013
- IEEE Design and Test