Publications

3 results for Melih Ozlem

Fin formation using graphoepitaxy DSA for FinFET device fabrication
- - Chi Chun Liu
  - Fee Li Lie
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Computational aspects of optical lithography extension by Directed Self-Assembly
- - Kafai Lai
  - Chi-Chun Liu
  - et al.
- 2013
- SPIE Advanced Lithography 2013