Publications

2 results for Matthias Budden

Tailored molecular glass resists for scanning probe lithography
- - Christian Neuber
  - Hans-Werner Schmidt
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Molecular glass resists for scanning probe lithography
- - Christian Neuber
  - Andreas Ringk
  - et al.
- 2014
- SPIE Advanced Lithography 2014